自有品牌

ARP-703 Specifications

Gas Supply

Ignition Process

100% Ar for Ignition Only

Up to 3SLM of NF3
(Post ignition NF3 can be added and Ar removed)

Operating Pressure

During ignition: 1 to 4 Torr @ 1 to 4 SLM for Ar
(Pressure measured at out let)

NF3 Operat ion

Post Ignition: 1 to 10 Torr post ignition up to 3 SLM
(Pressure measured at out let

Reactant Output
(NF₃ Operation)

>94% dissociat ion up t o 2.5 SLM, 3 to 10 Torr
>94% dissociat ion up t o 3.0 SLM, 5 to 10 Torr

Wetted Materials

6061-T6 Aluminum hardcoat anodized, 6061- T6 Aluminum,
Chemraz , A lumina , Sapphire

Utilities

180 t o 228 VAC, 50/60 Hz, 30A, 3P+G
Cooling water 1.5 GPM, < 30°C
Ambient 40°C max. (Non-condensing)

Physical

21.7 Kg
417mm x 207mm x 250mm (L x W x H)