Technical Service

Finesse provide technical service and support for customers such as:
1. ETO system diagnosis and upgrade
2. Plasma optical emission spectroscopy measurements and analysis of plasma processing.
3. RPS system upgrade and monitoring units.
4. The monitoring units for the microwave plasma processing.
5. Training course:
a. Plasma sources and application.
b. RF/Microwave power system and impedance matching.
c. Basic plasma physics and applications.
d. The principle and characteristics of MKS remote plasma source.
e. Introduction of MKS ozone generators.

If you have any request, please send the inquiry form to us, we will contact you as soon as possible.

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